Objective  We practise with numerical modelling of light diffraction on nano and microfeatures, propagation of optical radiation through metamaterials, excitation of evanescent fields and light localization with the aim to improve the art of measuring and manufacturing by numerous expedite virtual trials.   Principle We exploit the Finite-Difference Time-Domain method to solve Maxwell Equations. Emphasis is made on developing boundary conditions, incorporating multiphysics and arbitrary illumination sources to adapt the method for a variety of tasks in metrology and photonics engineering.
	Advantages - FDTD is universal, flexible and diversely applicable - Enables incorporation of dispersive and nonlinear models, correct treatment of sub-wavelength features and ultrafast phenomena; spectral simulations with a single run  - We provide efficient and robust parallel implementation of FDTD with adaptive meshing for cluster systems Service offering - Development of in-situ scatterometry-based solutions for control of production of nano-sized features in silicon chips and MEMS - Optimization of optical instrumentation, like confocal and near-field microscopy, spectral ellipsometry and surface plasmons sensors (biochips) - Design of passive and active photonics integrated circuits
Areas of application  - In-situ optical metrology for lithography, including defectoscopy, CD and overlay control, line-edge roughness measurement - Quantitative nanoimaging and nanocharacterization of patterned structures and multilayer thin films - Design of photonics integrated circuits, diffractive optical elements and MOEMS   Contact person Dr. Andrey Smirnov International Laboratory for Optical Diagnostics, Institute of physics of NASB Phone.: +375 (0)17 284 05 02 E-mail: Diese E-Mail Adresse ist gegen Spam Bots geschützt, Sie müssen Javascript aktivieren, damit Sie es sehen können http://www.isllod.org