| Development Of Heterodyne And Speckle Interferometry Methods For Industrial Applications |
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Objectives
PrincipleHeterodyne interferometry is based on the precise detection of the beat frequency between beams of two optical wavelengths. If one of two interfering waves is phase-shifted, the beat frequency undergoes the same amount of shift. Measuring it one extracts either the optical path difference or the phase anisotropy. The phase of the beat frequency signal can be measured with the accuracy better than 0.01 degree providing the most accurate interferometry technique available. Advantages
ApplicationsCrack detection in Si wafers ContactDr. Valery Gudelev
Application of near-IR heterodyne interferometry for crack detection in polycrystalline Si wafers used for solar cells manufacturing; a), b) – wafer images; c) phase anisotropy map demonstrateing the presence of microcracks of a 35-100 micron size. |